Method for sorting integrated circuit devices

ABSTRACT

A method for sorting integrated circuit (IC) devices of the type having a substantially unique identification (ID) code, such as a fuse ID, includes automatically reading the ID code of each of the IC devices and sorting the IC devices in accordance with their automatically read ID codes.

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application is a continuation of application Ser. No.09/713,901, filed Nov. 16, 2000, pending, which is a division ofapplication Ser. No. 09/520,067, filed Mar. 7, 2000, pending, which is acontinuation of application Ser. No. 09/133,338, filed Aug. 13, 1998,now U.S. Pat. No. 6,100,486, issued Aug. 8, 2000, which is a divisionalof application Ser. No. 08/785,353 entitled “METHOD FOR SORTINGINTEGRATED CIRCUIT DEVICES,” and filed Jan. 17, 1997, now U.S. Pat. No.5,927,512, issued Jul. 27, 1999.

[0002] The present application is also related to: a co-pendingapplication having Ser. No. 08/591,238, entitled “METHOD AND APARATUS[sic] FOR STORAGE OF TEST RESULTS WITHIN AN INTEGRATED CIRCUIT,” andfiled Jan. 17, 1996; a co-pending application having Ser. No.08/664,109, entitled “A STRUCTURE AND A METHOD FOR STORING INFORMATIONIN A SEMICONDUCTOR DEVICE,” and filed Jun. 13, 1996; a divisionalapplication having Ser. No. (unknown), entitled “METHOD FOR SORTINGINTEGRATED CIRCUIT DEVICES” and filed concurrently herewith, aco-pending application having Ser. No. 08/822,731, entitled “METHOD FORCONTINUOUS, NON LOT-BASED INTEGRATED CIRCUIT MANUFACTURING,” and filedMar. 24, 1997, now U.S. Pat. No. 5,856,923, issued Jan. 5, 1999; aco-pending application having Ser. No. 08/806,442, entitled “METHOD INAN INTEGRATED CIRCUIT (IC) MANUFACTURING PROCESS FOR IDENTIFYING ANDRE-DIRECTING IC'S MIS-PROCESSED DURING THEIR MANUFACTURE,” and filedFeb. 26, 1997, now U.S. Pat. No. 5,915,231, issued Jun. 22, 1999; aco-pending application having Ser. No. 08/871,015, entitled “METHOD FORUSING DATA REGARDING MANUFACTURING PROCEDURES INTEGRATED CIRCUITS (IC'S)HAVE UNDERGONE, SUCH AS REPAIRS, TO SELECT PROCEDURES THE IC'S WILLUNDERGO, SUCH AS ADDITIONAL REPAIRS,” and filed Jun. 6, 1997, now U.S.Pat. No. 5,907,492, issued May 25, 1999; and a co-pending applicationhaving Ser. No. 08/801,565 entitled “METHOD OF SORTING A GROUP OFINTEGRATED CIRCUIT DEVICES FOR THOSE DEVICES REQUIRING SPECIAL TESTING,”and filed Feb. 17, 1997, now U.S. Pat. No. 5,844,803, issued Dec. 1,1998.

BACKGROUND OF THE INVENTION

[0003] 1. Field of the Invention

[0004] The present invention relates in general to integrated circuit(IC) manufacturing and, more specifically, to methods in ICmanufacturing processes for sorting IC devices using identification (ID)codes, such as fuse ID's, in the devices.

[0005] 2. State of the Art

[0006] Integrated circuits (IC's) are small electronic circuits formedon the surface of a wafer of semiconductor material, such as silicon, inan IC manufacturing process referred to as “fabrication.” Oncefabricated, IC's are electronically probed to evaluate a variety oftheir electronic characteristics, cut from the wafer on which they wereformed into discrete IC dice or “chips,” and then assembled for customeruse using various well-known IC packaging techniques, including leadframe packaging, Chip-On-Board (COB) packaging, and flip-chip packaging.

[0007] Before being shipped to customers, packaged IC's are generallytested to ensure they will function properly once shipped. Testingtypically involves a variety of known test steps, such as pre-grade,burn-in, and final, which test IC's for defects and functionality andgrade IC's for speed. As shown in FIG. 1, IC's that pass the describedtesting are generally shipped to customers, while IC's that fail thetesting are typically rejected.

[0008] The testing standards for a particular IC product are sometimesrelaxed as the product “matures” such that IC's previously rejectedunder strict testing standards may pass the relaxed testing standards.Consequently, reject bins containing previously rejected IC's aresometimes “culled” for IC's that are shippable under relaxed testingstandards by testing the rejected IC's again using the relaxed testingstandards. Unfortunately, while this “culling” process does retrieveshippable IC's from reject bins, it makes inefficient use of expensiveand often limited testing resources by diverting those resources awayfrom testing untested IC's in order to retest previously rejected IC's.Therefore, there is a need in the art for an improved method of“culling” or sorting such reject bins for shippable IC's.

[0009] Similarly, as shown in FIG. 2, all the IC's from the wafers in awafer lot typically undergo enhanced reliability testing that is moreextensive and strict than normal testing when any of the wafers in thelot are deemed to be unreliable because of fabrication or other processerrors. Since a wafer lot typically consists of fifty or more wafers,many of the IC's that undergo the enhanced reliability testing do notrequire it because they come from wafers that are not deemed unreliable.Performing enhanced reliability testing on IC's that do not need it isinefficient because such testing is typically more time-consuming anduses more resources than normal testing. Therefore, there is a need inthe art for a method of sorting IC's from a wafer lot into those IC'sthat require enhanced reliability testing and those that do not.

[0010] Likewise, as shown in FIG. 3, a new or special “recipe” forfabricating IC's on wafers is sometimes tested by fabricating somewafers from a wafer lot using the special recipe and other wafers fromthe wafer lot using a control recipe. IC's from the wafers thentypically undergo separate assembly and test procedures so that the testresults of IC's fabricated using the special recipe are not mixed withthe test results of IC's fabricated using the control recipe, and viceversa. Test reports from the separate test procedures are then used toevaluate the special recipe and to determine whether the IC's are to beshipped to customers, reworked, repaired, retested, or rejected.Unfortunately, because the IC's undergo separate test and assemblyprocedures, undesirable variables, such as differences in assembly andtest equipment, are introduced into the testing of the special recipe.It would be desirable, instead, to be able to assemble and test the IC'susing the same assembly and test procedures, and to then sort the IC'sand their test results into those IC's fabricated using the specialrecipe and those IC's fabricated using the control recipe. Therefore,there is a need in the art for a method of identifying individual IC'sfabricated using a special or control recipe and sorting the IC's basedon their fabrication recipe.

[0011] As described above, IC's are typically tested for variouscharacteristics before being shipped to customers. For example, as shownin FIG. 4, IC's may be graded in test for speed and placed in variousbins (e.g., 5 nanoseconds (ns), 6 ns, and 7 ns bins) according to theirgrading. If a customer subsequently requests a more stringent speedgrade (e.g., 4 ns), IC's in one of the bins (e.g., a 5 ns bin) arere-tested and thereby sorted into IC's that meet the more stringentspeed grade (e.g., 4 ns bin) and those that do not (e.g., 5 ns bin).While this conventional process sorts the IC's into separate speedgrades, it makes inefficient use of expensive and often limited testingresources by diverting those resources away from testing untested IC'sin order to retest previously tested IC's. Therefore, there is a need inthe art for an improved method of “culling” or sorting bins for IC'sthat meet more stringent standards, such as a higher speed grading.

[0012] As described in U.S. Pat. No. Nos. 5,301,143, 5,294,812, and5,103,166, some methods have been devised to electronically identifyindividual IC's. Such methods take place “off” the manufacturing lineand involve the use of electrically retrievable ID codes, such asso-called “fuse ID's,” programmed into individual IC's to identify theIC's. The programming of a fuse ID typically involves selectivelyblowing an arrangement of fuses and anti-fuses in an IC so that when thefuses or anti-fuses are accessed, they output a selected ID code.Unfortunately, none of these methods addresses the problem ofidentifying and sorting IC's “on” a manufacturing line.

BRIEF SUMMARY OF THE INVENTION

[0013] An inventive method for sorting integrated circuit (IC) devicesof the type to have a substantially unique identification (ID) code,such as a fuse ID, includes automatically reading the ID code of each ofthe IC devices and sorting the IC devices according to theirautomatically read ID codes. The inventive method can be used inconjunction with an IC manufacturing process that includes providingsemiconductor wafers, fabricating the IC's on each of the wafers,causing each of the IC's to store its ID code, separating each of theIC's from its wafer to form an IC die, assembling the IC dice into ICdevices, and testing the IC devices. The method can also be used inconjunction with Single In-line Memory Module (SIMM), Dual In-lineMemory Module (DIMM), and other multi-chip module (MCM) manufacturingprocesses.

[0014] In another embodiment, an inventive method for recovering ICdevices from a group of IC devices that have previously been rejected inaccordance with a test standard that has since been relaxed includes:storing test results that caused each of the IC devices in the group tobe rejected in connection with an ID code, such as a fuse ID, associatedwith each device; automatically reading the ID code from each of the ICdevices; accessing the test results stored in connection with each ofthe automatically read ID codes; comparing the accessed test results foreach of the IC devices with the relaxed test standard; and sorting theIC devices according to whether their accessed test results pass therelaxed test standard in order to recover any of the IC devices havingtest results that pass the relaxed test standard.

[0015] By sorting the IC devices in accordance with their previouslystored test results and their ID codes, the above-described inventivemethod eliminates the need to retest the IC devices after the teststandard is relaxed in order to cull shippable IC devices from therejected devices.

[0016] In still another embodiment, a method for sorting a group of ICdevices in accordance with a first IC standard, such as a speedstandard, that have previously been sorted in accordance with a secondIC standard, such as a speed standard that is less stringent than thefirst IC standard, includes storing test results that caused each of theIC devices in the group to be sorted into the group in connection withID codes, such as fuse ID's, of the devices, automatically reading theID code from each of the IC devices, accessing the test results storedin connection with each of the automatically read ID codes, comparingthe accessed test results for each of the IC devices with the first ICstandard, and sorting the IC devices according to whether their testresults pass the first IC standard.

[0017] In a further embodiment, an inventive back-end test method forseparating IC devices in need of enhanced reliability testing from agroup of IC devices undergoing back-end test procedures includes:storing a flag in connection with an ID code, such as a fuse ID,associated with each of the IC devices in the group indicating whethereach IC device is in need of enhanced reliability testing; automaticallyreading the ID code of each of the IC devices in the group; accessingthe enhanced reliability testing flag stored in connection with each ofthe automatically read ID codes; and sorting the IC devices inaccordance with whether their enhanced reliability testing flagindicates they are in need of enhanced reliability testing.

[0018] Thus, the inventive method described above provides anadvantageous method for sorting IC's from the same wafer lot into thoseIC's that require enhanced reliability testing and those that do not.

[0019] In a still further embodiment, an inventive method in an ICmanufacturing process for testing different fabrication process recipesincludes the following: providing first and second pluralities ofsemiconductor wafers; fabricating a first plurality of IC's on each ofthe first plurality of wafers in accordance with a control recipe;fabricating a second plurality of IC's on each of the second pluralityof wafers in accordance with a test recipe; causing each of the IC's oneach of the wafers to permanently store a substantially unique ID code,such as a fuse ID; separating each of the IC's on each of the wafersfrom its wafer to form one of a plurality of IC dice; assembling each ofthe IC dice into an IC device; automatically reading the ID code fromthe IC in each of the IC devices; testing each of the IC devices; andsorting each of the IC devices in accordance with the automatically readID code from the IC in each of the IC devices indicating the IC is fromone of the first and second pluralities of IC's.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

[0020]FIG. 1 is a flow diagram illustrating a conventional procedure inan integrated circuit (IC) manufacturing process for culling shippableIC's from a reject bin;

[0021]FIG. 2 is a flow diagram illustrating a conventional procedure inan IC manufacturing process for directing IC's to enhanced reliabilitytesting;

[0022]FIG. 3 is a flow diagram illustrating a conventional procedure inan IC manufacturing process for testing a new or special fabricationprocess recipe;

[0023]FIG. 4 is a flow diagram illustrating a conventional procedure inan IC manufacturing process for speed-sorting IC's;

[0024]FIG. 5 is a flow diagram illustrating a procedure in an integratedcircuit (IC) manufacturing process for culling shippable IC's from areject bin in accordance with the present invention;

[0025]FIG. 6 is a flow diagram illustrating a procedure in an ICmanufacturing process for directing IC's to enhanced reliability testingin accordance with another embodiment of the present invention;

[0026]FIG. 7 is a flow diagram illustrating a procedure in an ICmanufacturing process for testing a new or special fabrication processrecipe in accordance with still another embodiment of the presentinvention; and

[0027]FIG. 8 is a flow diagram illustrating a procedure in an ICmanufacturing process for speed-sorting IC's in accordance with afurther embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION

[0028] As shown in FIG. 5, an inventive method for sorting integratedcircuit (IC) devices is embodied in a method 10 in an IC manufacturingprocess for culling shippable IC's from a reject bin 12. It will beunderstood by those having skill in the field of this invention that thepresent invention is applicable to sorting any IC devices, includingDynamic Random Access Memory (DRAM) IC's, Static Random Access Memory(SRAM) IC's, Synchronous DRAM (SDRAM) IC's, processor IC's, SingleIn-line Memory Modules (SIMM's), Dual In-line Memory Modules (DIMM's),and other Multi-Chip Modules (MCM's).

[0029] The method 10 includes the step 14 of fabricating IC's on wafersfrom a wafer lot 16. IC's fabricated on the wafers are then programmedin a program step 18 in the manner described above with a fuseidentification (ID) unique to each IC. The fuse ID may identify a waferlot ID, the week the IC's were fabricated, a wafer ID, a die location onthe wafer, and a fabrication facility ID. It will be understood, ofcourse, that the present invention includes within its scope IC's havingany ID code, including those having fuse ID's. It will also beunderstood that the ID code for each IC need not be unique, but insteadmay only specify the wafer the IC comes from, for example.

[0030] Once programmed, the IC's proceed through an assembly step 20 toa test step 22 where the fuse ID's are automatically read and stored inassociation with test data 24 generated in the test step 22. Althoughthe fuse ID's are typically read electronically, it will be understoodthat they may also be read optically if the fuse ID consists of “blown”laser fuses that are optically accessible. It will also be understoodthat the test data 24 may include data such as the following: dataidentifying the testing equipment that tested the IC's, operatingpersonnel who operated the testing equipment, and the set-up of theequipment when the IC's were tested; and data indicating the time anddate the IC's were tested, the yield of shippable IC's through the teststep 22, and test results for the IC's from the various stages of thetest step 22.

[0031] IC's that pass the test step 22 are typically shipped tocustomers, while those that fail the test step 22 are directed to thereject bin 12. At a point in time when test standards of the test step22 have been relaxed as described above, the IC's in the reject bin 12are sorted in a sort step 26 by reading the fuse ID of each IC,accessing the test data 24 associated with the fuse ID, and comparingthe accessed test data 24 with the relaxed test standards. Those IC'sthat fail even the relaxed test standards are directed back to thereject bin 12, while those IC's that pass the relaxed test standards aretypically shipped to customers. The method 10 thus successfully cullsshippable IC's from the reject bin 12 without retesting the IC's.

[0032] As shown in FIG. 6, the inventive sorting method is also embodiedin a backend (i.e., after fabrication) test method 30 for separatingIC's in need of enhanced reliability testing from a group of IC'sundergoing back-end test procedures. IC's typically require enhancedreliability testing because the wafer they come from is unreliable as aresult of fabrication errors and other unintended manufacturing processdeviations.

[0033] The method 30 includes the step 32 of fabricating IC's on wafersfrom a wafer lot 34. IC's fabricated on the wafers are then programmedin a program step 36 in the manner described above with a fuseidentification (ID) unique to each IC. The fuse ID may identify a waferlot ID, the week the IC's were fabricated, a wafer ID, a die location onthe wafer, and a fabrication facility ID. It will be understood, ofcourse, that the present invention includes within its scope IC's havingany ID code, including those having fuse ID's. It will also beunderstood that the ID code for each IC need not be unique, but insteadmay only specify the wafer the IC comes from, for example.

[0034] Once programmed, the IC's proceed through an assembly step 38. Atthis point in the IC manufacturing process, it is not uncommon for anumber of wafers to have been identified as being unreliable for thereasons stated above. The fuse ID's of the IC's that come from theseunreliable wafers may then be associated with a stored flag indicatingthe IC's come from unreliable wafers. If any wafers in the wafer lot 34have been identified as being unreliable, the IC's proceed to a sortstep 40, where their fuse ID's are automatically read so the IC's can besorted into those flagged as coming from the unreliable wafers thatrequire processing through an enhanced reliability testing step 42 andthose not flagged as coming from the unreliable wafers that may proceedthrough a standard test step 44. Of course, those IC's that pass eitherthe standard test step 44 or the enhanced reliability testing step 42are typically shipped to customers, while those that fail these stepsare directed to a reject bin (not shown).

[0035] Thus, the present invention provides a method 30 that directsthose IC's needing enhanced reliability testing to the enhancedreliability testing step 42 while allowing those that do not requireenhanced reliability testing to proceed through the standard testingstep 44.

[0036] As shown in FIG. 7, the inventive sorting method is furtherembodied in a method 50 for testing different fabrication processrecipes. Such testing is typically done in accordance with a SpecialWork Request (SWR) from an engineer or technician.

[0037] The method 50 includes fabricating some of the wafers from awafer lot 52 in a fabrication step 54 in accordance with a controlprocess recipe that is typically the normal process recipe in use in theIC manufacturing process at the time. The remainder of the wafers fromthe wafer lot 52 are fabricated in another fabrication step 56 inaccordance with a special or test process recipe. The special or testprocess recipe may change a variety of variables in the fabricationprocess, including doping, the thickness of IC layers, etc.

[0038] Once the IC's are fabricated in the fabrication steps 54 and 56,the IC's are then programmed in a program step 58 in the mannerdescribed above with a fuse identification (ID) unique to each IC. Thefuse ID may identify a wafer lot ID, the week the IC's were fabricated,a wafer ID, a die location on the wafer, and a fabrication facility ID.It will be understood, of course, that the present invention includeswithin its scope IC's having any ID code, including those having fuseID's. It will also be understood that the ID code for each IC need notbe unique, but instead may only specify the wafer the IC comes from, forexample.

[0039] Once programmed, the IC's proceed through an assembly step 60 toa test step 62 where the fuse ID's are automatically read and stored inassociation with test data 64 generated for both the control recipe IC'sand the special or test recipe IC's in the test step 62. Although thefuse ID's are typically read electronically, it will be understood thatthey may also be read optically if the fuse ID consists of “blown” laserfuses that are optically accessible. It will also be understood that thetest data 64 may include data such as the following: data identifyingthe testing equipment that tested the IC's, operating personnel whooperated the testing equipment, and the set-up of the equipment when theIC's were tested; and data indicating the time and date the IC's weretested, the yield of shippable IC's through the test step 62, and testresults for the IC's from the various stages of the test step 62.

[0040] Once the test data 64 is generated, the data 64 may be analyzed67 to determine those IC's that are shippable and those that are not,and to determine any differences in test results between the controlrecipe IC's and the special or test recipe IC's. The IC's are sorted ina sort step 66 so they may be shipped, reworked, repaired, retested, orrejected in accordance with the analysis of the test results.

[0041] By sorting the control recipe 68 and special or test recipe 69IC's at the end of the IC manufacturing process, the method 50 is ableto assemble and test the IC's together and thus eliminate unintendedvariables introduced into the process of testing the special or testrecipe by the conventional method of assembling and testing the IC'sseparately. The inventive method 50 thus provides more reliable testresults.

[0042] As shown in FIG. 8, the inventive method for sorting IC devicesis also embodied in a method 70 in an IC manufacturing process forsorting IC devices in accordance with an IC standard, such as speed,that is more stringent than an IC standard that the devices werepreviously sorted in accordance with. It will be understood thatalthough the method of FIG. 8 will be described with respect tospeed-sorting, the method is applicable to all situations in which IC'spreviously sorted in accordance with an IC standard, such as speed, needto be sorted in accordance with another, more stringent IC standard.Such IC standards may include, for example, access time, data setuptime, data hold time, standby current, refresh current, and operatingcurrent.

[0043] The method 70 includes the step 72 of fabricating IC's on wafersfrom a wafer lot 74. IC's fabricated on the wafers are then programmedin a program step 76 in the manner described above with a fuseidentification (ID) unique to each IC. The fuse ID may identify a waferlot ID, the week the IC's were fabricated, a wafer ID, a die location onthe wafer, and a fabrication facility ID. It will be understood, ofcourse, that the present invention includes within its scope IC's havingany ID code, including those having fuse ID's.

[0044] Once programmed, the IC's proceed through an assembly step 78 toa test step 80 where the fuse ID's are automatically read and stored inassociation with test data 82 generated in the test step 80. Althoughthe fuse ID's are typically read electronically, it will be understoodthat they may also be read optically if the fuse ID consists of “blown”laser fuses that are optically accessible. It will also be understoodthat the test data 82 includes speed grading data for each IC, asdescribed above, and may include data such as the following: dataidentifying the testing equipment that tested the IC's, operatingpersonnel who operated the testing equipment, and the set-up of theequipment when the IC's were tested; and data indicating the time anddate the IC's were tested, the yield of shippable IC's through the teststep 80, and test results for the IC's from the various stages of thetest step 80.

[0045] IC's that pass the test step 80 are typically directed to speedgraded bins 84, 86, and 88, while those that fail the test step 80 aredirected to a reject bin 90. The speed graded bins 84, 86, and 88typically each contain IC's of varying speeds. For example, the bin 88may contain a variety of 5.0 ns, 4.5 ns, 4.0 ns, 3.5 ns, etc. parts, thebin 86 may contain a variety of 6.0 ns, 5.5 ns, 5.1 ns, etc. parts, andthe bin 84 may contain a variety of 7.0 ns, 6.5 ns, 6.1 ns, etc. parts.

[0046] On occasion, customers request IC's that meet a more stringentspeed standard (e.g., 4 nanoseconds (ns)) than any of the IC's in thevarious bins 84, 86, and 88 have been graded for. While bin 88, forexample, may contain IC's that will meet the more stringent speedstandard, the bin 88 cannot be used to supply the customer's requestbecause the IC's in the bin 88 have only been graded (i.e., areguaranteed to meet or exceed) a lower speed standard (e.g., 5 ns).Therefore, the present inventive method 70 sorts the IC's in a sort step92 by reading the fuse ID of each IC, accessing the test data 82,including the speed-grading data, associated with the fuse ID, andcomparing the accessed speed-grading data with the more stringent speedstandard (e.g., 4 ns). Those IC's that fail the more stringent speedstandard are directed to a speed graded bin 94, while those IC's thatpass the more stringent speed standard are directed to another speedgraded bin 96 where they can be used to fill the customer's request. Theinventive method 70 thus sorts the IC's in accordance with a morestringent IC standard, such as speed, than they were previously sortedin accordance with without having to retest the IC's, and thus withoutreusing valuable testing resources to retest IC's.

[0047] Although the present invention has been described with referenceto particular embodiments, the invention is not limited to thesedescribed embodiments. For example, while the various steps of theembodiments of the inventive sorting method have been described asoccurring in a particular order, it will be understood that these stepsneed not necessarily occur in the described order to fall within thescope of the present invention. Thus, the invention is limited only bythe appended claims, which include within their scope all equivalentmethods that operate according to the principles of the invention asdescribed.

What is claimed is:
 1. An integrated circuit manufacturing process forseparating integrated circuit devices for enhanced reliability testingfrom a group of integrated circuit devices, said integrated circuitdevices each having a substantially unique identification code, theprocess comprising: storing a flag in connection with the identificationcode of each integrated circuit device of the integrated circuit devicesin a group indicating if each integrated circuit device needs enhancedreliability testing; reading the identification code of each integratedcircuit device of the integrated circuit devices in the group; accessingthe enhanced reliability testing flag stored in connection with each ofthe identification codes for each integrated circuit device in thegroup; sorting the integrated circuit devices in the group from theirenhanced reliability testing flag; and performing enhanced reliabilitytesting on integrated circuit devices needing enhanced reliabilitytesting.
 2. The method of claim 1, wherein the step of sorting theintegrated circuit devices comprises sorting the integrated circuitdevices in accordance with their enhanced reliability testing flagindicates they come from one of a reliable semiconductor wafer and anunreliable semiconductor wafer.